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Effects of anodisation parameters on thin film properties: a review

CMOS integrated circuits; Metallic compounds; Metals; MOS devices; Oxide semiconductors; Temperature; Thin films; Anodisation; Anodising; Applied voltages; Complementary metal oxide semiconductors; Metal oxide film; Nano-structured; Thickness; Thin-film properties; Oxide films

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Bibliographic Details
Main Authors:	Wong Y.H., Affendy M.G., Lau S.K., Teh P.C., Lee H.J., Tan C.Y., Ramesh S.
Other Authors:	36605495300
Format:	Review
Published:	Taylor and Francis Ltd. 2023
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