Effects of anodisation parameters on thin film properties: a review
CMOS integrated circuits; Metallic compounds; Metals; MOS devices; Oxide semiconductors; Temperature; Thin films; Anodisation; Anodising; Applied voltages; Complementary metal oxide semiconductors; Metal oxide film; Nano-structured; Thickness; Thin-film properties; Oxide films
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| Main Authors: | , , , , , , |
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| Other Authors: | |
| Format: | Review |
| Published: |
Taylor and Francis Ltd.
2023
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