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A review: Properties of silicon carbide materials in MEMS application

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書誌詳細
主要な著者:	Noraini, Marsi, Burhanuddin, Yeop Majlis, Faisal Mohd, Yasin, Hafzaliza Erny, Zainal Abidin, Azrul Azlan, Hamzah
その他の著者:	mnoraini@uthm.edu.my
フォーマット:	論文
言語:	English
出版事項:	Universiti Malaysia Perlis (UniMAP) 2021
主題:	MEMS Silicon carbide High temperature Radiation Sensor
オンライン･アクセス:	http://dspace.unimap.edu.my:80/xmlui/handle/123456789/69528
タグ:	タグ追加タグなし, このレコードへの初めてのタグを付けませんか!

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