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A review: Properties of silicon carbide materials in MEMS application

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Main Authors:	Noraini, Marsi, Burhanuddin, Yeop Majlis, Faisal Mohd, Yasin, Hafzaliza Erny, Zainal Abidin, Azrul Azlan, Hamzah
其他作者:	mnoraini@uthm.edu.my
格式:	Article
語言:	English
出版:	Universiti Malaysia Perlis (UniMAP) 2021
主題:	MEMS Silicon carbide High temperature Radiation Sensor
在線閱讀:	http://dspace.unimap.edu.my:80/xmlui/handle/123456789/69528
標簽:	添加標簽沒有標簽, 成為第一個標記此記錄!

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