A review: Properties of silicon carbide materials in MEMS application
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Universiti Malaysia Perlis (UniMAP)
2021
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my.unimap-695282021-02-05T07:24:21Z A review: Properties of silicon carbide materials in MEMS application Noraini, Marsi Burhanuddin, Yeop Majlis Faisal Mohd, Yasin Hafzaliza Erny, Zainal Abidin Azrul Azlan, Hamzah mnoraini@uthm.edu.my MEMS Silicon carbide High temperature Radiation Sensor Link to publisher's homepage at http://ijneam.unimap.edu.my The paper presents the review properties of silicon carbide materials in the MEMS application. The study aims to explore silicon carbide in MEMS technology which considers the development of microscale and integrated devices that combine electronics, electrical and mechanical elements. MEMS has become a key area micro-device technology which incorporates materials, mechanical, electrical, chemical and optical disciplines as well as fluid engineering. The prevalence of MEMS technology in harsh environments has grown tremendously in recent years, especially at high temperatures up to 1240˚C, wider bandgap (2.3 – 3.4 eV), a higher breakdown field (30 × 105 V/cm), a higher thermal conductivity (3.2 – 4.9 W/cm- K), a higher saturation velocity (2.5 × 107 cm/s), higher oxidation, corrosive environments and higher radiation. Recent developments in robust MEMS for extreme environments such as MEMS pressure sensors have been widely used in ships, warships, gas turbine engines, cars and biomedical equipment. The growing demand for MEMS pressure sensors with high-temperature operating capabilities, mainly for automotive, gas turbine engine and aerospace applications was investigated from this study as alternative silicon carbide to silicon in the fabrication of these devices. 2021-02-05T07:24:21Z 2021-02-05T07:24:21Z 2020-12 Article International Journal of Nanoelectronics and Materials, vol.13(Special Issue), 2020, pages 113-128 1985-5761 (Printed) 1997-4434 (Online) http://dspace.unimap.edu.my:80/xmlui/handle/123456789/69528 en NANOSYM, 2019; Universiti Malaysia Perlis (UniMAP) |
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Universiti Malaysia Perlis |
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UniMAP Library |
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Institutional Repository |
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Asia |
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Malaysia |
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Universiti Malaysia Perlis |
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UniMAP Library Digital Repository |
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http://dspace.unimap.edu.my/ |
| language |
English |
| topic |
MEMS Silicon carbide High temperature Radiation Sensor |
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MEMS Silicon carbide High temperature Radiation Sensor Noraini, Marsi Burhanuddin, Yeop Majlis Faisal Mohd, Yasin Hafzaliza Erny, Zainal Abidin Azrul Azlan, Hamzah A review: Properties of silicon carbide materials in MEMS application |
| description |
Link to publisher's homepage at http://ijneam.unimap.edu.my |
| author2 |
mnoraini@uthm.edu.my |
| author_facet |
mnoraini@uthm.edu.my Noraini, Marsi Burhanuddin, Yeop Majlis Faisal Mohd, Yasin Hafzaliza Erny, Zainal Abidin Azrul Azlan, Hamzah |
| format |
Article |
| author |
Noraini, Marsi Burhanuddin, Yeop Majlis Faisal Mohd, Yasin Hafzaliza Erny, Zainal Abidin Azrul Azlan, Hamzah |
| author_sort |
Noraini, Marsi |
| title |
A review: Properties of silicon carbide materials in MEMS application |
| title_short |
A review: Properties of silicon carbide materials in MEMS application |
| title_full |
A review: Properties of silicon carbide materials in MEMS application |
| title_fullStr |
A review: Properties of silicon carbide materials in MEMS application |
| title_full_unstemmed |
A review: Properties of silicon carbide materials in MEMS application |
| title_sort |
review: properties of silicon carbide materials in mems application |
| publisher |
Universiti Malaysia Perlis (UniMAP) |
| publishDate |
2021 |
| url |
http://dspace.unimap.edu.my:80/xmlui/handle/123456789/69528 |
| _version_ |
1698698617167020032 |
| score |
13.250246 |