Electrostatic pull-in characteristic of silicon diaphragm for MEMS micropump design
Malaysian Technical Universities Conference on Engineering and Technology (MUCET) 2012 organised by technical universities under the Malaysian Technical Universities Network (MTUN), 20th - 21st November 2012 at Hotel Seri Malaysia, Kangar, Perlis.
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| Main Authors: | , |
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| Other Authors: | |
| Format: | Working Paper |
| Language: | English |
| Published: |
Malaysian Technical Universities Network (MTUN)
2013
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| Subjects: | |
| Online Access: | http://dspace.unimap.edu.my/xmlui/handle/123456789/26593 |
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