Design and fabrication of a quasi-ordered nanoporous silicon membrane suitable for thermally induced drug release
The design and fabrication of an ordered nanoporous silicon membrane and integrated heater and temperature sensor is described. The methodology for fabrication of the nanoporous structure has been developed for integration within microelectromechanical systems. The structure is fabricated from a 500...
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| フォーマット: | 論文 |
| 出版事項: |
2023
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