Study of Semi-Recessed LOCOS for Quasi-nanoscale CMOS Device Isolation
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Main Author: | Mohamad Idzham Abd Sani |
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Other Authors: | Zaliman Sauli, P.M. (Advisor) |
Format: | Learning Object |
Language: | English |
Published: |
Universiti Malaysia Perlis
2008
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Subjects: | |
Online Access: | http://dspace.unimap.edu.my/xmlui/handle/123456789/1362 |
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