Study the effect of bird’s beak on Fully Recessed LOCOS and Poly Buffered LOCOS using 2 different pad Oxide
Device isolation is one of the most important technology features towards the realization of very large scale CMOS device integration. Since the early days of semiconductor industry, LOCOS isolation has been the major isolation scheme. However, one of it is major drawback is the oxide encroachment,...
Saved in:
| Main Author: | |
|---|---|
| Other Authors: | |
| Format: | Learning Object |
| Language: | English |
| Published: |
Universiti Malaysia Perlis
2008
|
| Subjects: | |
| Online Access: | http://dspace.unimap.edu.my/xmlui/handle/123456789/1931 |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|