Study of Semi-Recessed LOCOS for Quasi-nanoscale CMOS Device Isolation

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Bibliographic Details
Main Author: Mohamad Idzham Abd Sani
Other Authors: Zaliman Sauli, P.M. (Advisor)
Format: Learning Object
Language:English
Published: Universiti Malaysia Perlis 2008
Subjects:
Online Access:http://dspace.unimap.edu.my/xmlui/handle/123456789/1362
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