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Improvement of c-axis (002) AlN crystal plane by temperature assisted HiPIMS technique

Purpose This study aims to investigate the effect of temperature applied at the initial deposition of Aluminium Nitride (AlN) thin-film on a silicon substrate by high-power impulse magnetron sputtering (HiPIMS) technique. Design/methodology/approach HiPIMS system was used to deposit AlN thin film at...

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書誌詳細
主要な著者:	Azman, Zulkifli, Nayan, Nafarizal, Megat Hasnan, Megat Muhammad Ikhsan, Othman, Nurafiqah, Bakri, Anis Suhaili, Abu Bakar, Ahmad Shuhaimi, Mamat, Mohamad Hafiz, Mohd Yusop, Mohd Zamri
フォーマット:	論文
出版事項:	Emerald 2021
主題:	TA Engineering (General). Civil engineering (General)
オンライン･アクセス:	http://eprints.um.edu.my/34003/
タグ:	タグ追加タグなし, このレコードへの初めてのタグを付けませんか!

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