Design of high force density fishbone-shaped electrostatic actuator using finite element / Megat Muhammad Ikhsan Megat Hasnan
This study presents the design and evaluation of high force density fishbone shaped electrostatic comb drive actuator. The fishbone shaped comb drive actuator has structure similar to fishbone, which is intended to increase the capacitance of the electrodes, and hence increase the electrostatic a...
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| Format: | Thesis |
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2014
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| Online Access: | http://studentsrepo.um.edu.my/8736/6/KGA120043.pdf http://studentsrepo.um.edu.my/8736/ |
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