Improvement of c-axis (002) AlN crystal plane by temperature assisted HiPIMS technique
Purpose This study aims to investigate the effect of temperature applied at the initial deposition of Aluminium Nitride (AlN) thin-film on a silicon substrate by high-power impulse magnetron sputtering (HiPIMS) technique. Design/methodology/approach HiPIMS system was used to deposit AlN thin film at...
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| Main Authors: | , , , , , , , |
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| Format: | Article |
| Published: |
Emerald
2021
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| Subjects: | |
| Online Access: | http://eprints.um.edu.my/34003/ |
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