Cover Image

Process Development and Optimization of Carbon-Based Thin Film Deposition through Ablation of Graphite

This paper reports the deposition of carbon nanomaterials on silicon substrate using a dense plasma focus device. The film property is studied using a field emission scanning electron microscopy (FESEM) and energy dispersive X-ray (EDX). The first test was deposited using 1, 3, 5, and 7 focus shots...

Full description

Saved in:

Bibliographic Details
Main Authors:	Low, Andrew Chun Wey, Damideh, Vahid, Saw, S. H., Lim, Chin Seong
Format:	Article
Published:	Trans Tech Publications 2016
Subjects:	QC Physics
Online Access:	http://eprints.intimal.edu.my/755/ https://www.scientific.net/KEM.701.42
Tags:	Add Tag No Tags, Be the first to tag this record!

Similar Items

Process Development and Optimization of Carbon-Based Thin Film Deposition through Ablation of Graphite
by: Low, Andrew Chun Wey, et al.
Published: (2016)

Dynamics of double plume emissions in TEA-CO2 laser ablation of graphite
by: Siew, W.O., et al.
Published: (2003)

Graphite thin film deposition using laser induced plasma
by: Chaudhary, K. T., et al.
Published: (2011)

Giant magnetoresistance in granular cobalt copper thin films prepared by pulsed laser ablation deposition
by: Jackson, Timothy James, et al.
Published: (1996)

UV-Vis characterization of diamond-like carbon thin films deposited using (DC-PECVD)
by: Ab. Rahman, Nur Alifah
Published: (2010)

Multi-phase structured silicon carbon nitride thin films prepared by hot-wire chemical vapour deposition
by: Badaruddin, M.R., et al.
Published: (2011)

Morphological studies of silicon carbide thin film deposited by very high frequency - plasma enhanced chemical vapour deposition through gas dilution adjustment
by: Ibrahim, Zainur Atika, et al.
Published: (2022)

Comparative Study of Fast Focus Mode and Slow Focus Mode in Plasma Focus Devices
by: Damideh, Vahid
Published: (2016)

Facile synthesis of porous-structured nickel oxide thin film by pulsed laser deposition
by: Jahromi, S.P., et al.
Published: (2012)

Nanocrystalline silicon thin films by RF plasma enhanced chemical vapour deposition
by: Han, S.C., et al.
Published: (2006)

Multi-phase structured hydrogenated amorphous silicon carbon nitride thin films grown by plasma enhanced chemical vapour deposition
by: Abdul Rahman, M.A., et al.
Published: (2017)

Development of very high frequency plasma enhanced chemical vapour deposition for nanostructure silicon carbide thin film deposition
by: Omar, Muhammad Firdaus
Published: (2016)

200 °C annealed combinatorially deposited chalcogenide based metallic thin films for photovoltaics
by: Ali, Nisar, et al.
Published: (2015)

Development of pulsed laser ablation deposition for synthesis of carbon nanostructure
by: Liew, Seng Choy
Published: (2014)

Diamondlike carbon thin film deposition using a RF planar coil inductively coupled plasma system / Liew Wai Soon
by: Liew, Wai Soon
Published: (2001)

Crystallinity and morphology of silicon carbide thin films deposited using very high frequency plasma enchanced chemical vapor deposition
by: Muizzudin, Muhamad Azali, et al.
Published: (2018)

Structural and optical properties of nc-Si:H thin films deposited by layer-by-layer technique
by: Goh, Boon Tong, et al.
Published: (2014)

Effects of rf power on the structural properties of carbon nitride thin films prepared by plasma enhanced chemical vapour deposition
by: Othman, Maisara, et al.
Published: (2011)

Effects of Rf power on structural properties of Nc-Si:H Thin Films deposited by Layer-By-Layer (LbL) deposition technique
by: Tong, G.B., et al.
Published: (2012)

Field electron emission properties of carbon nanotube films deposited by electrophoresis
by: Nor, R.M.
Published: (2011)

Influence of film thickness on the structural, electrical and photoluminescence properties of vacuum deposited Alq(3) thin films on c-silicon substrate
by: Koay, J.Y., et al.
Published: (2009)

Effects of annealing on the electro-optical properties of a-Si:H thin films deposited by D.C. and pulsed PECVD
by: Seck, Chai Lim, et al.
Published: (2004)

Corrosion inhibition of cold-rolled low carbon steel with pulse fiber laser ablation in water
by: Chan, Sze Ney, et al.
Published: (2018)

Optical properties of annealed Si:H thin film prepared by layer-by-layer (LBL) deposition technique
by: Goh, Boon Tong, et al.
Published: (2010)

Parametric studies of thin film nickel catalyst for the growth of carbon nanotubes
by: Saidin, Mohammad Abdul Razis, et al.
Published: (2008)

Effect of liquid layer thickness on the ablation efficiency and the size-control of silver colloids prepared by pulsed laser ablation
by: Al-Azawi, Mohammed, et al.
Published: (2015)

Dynamic mechanical properties of bio-polymer graphite thin films
by: Kamarudin, M.Saddam, et al.
Published: (2017)

Characteristics Of TiO2-Cu Thin Films Deposited Via Using Electrospray Technique
by: Al-Alousi, Mazin A., et al.
Published: (2020)

Characteristics Of TiO2-Cu Thin Films Deposited Via Using Electrospray Technique
by: Al-Alousi, Mazin A., et al.
Published: (2020)

Optical properties and crystallinity of hydrogenated nanocrystalline silicon (nc-Si:H) thin films deposited by rf-PECVD
by: Tong, G.B., et al.
Published: (2012)

Structural and surface morphology of nanocystalline bismuth telluride thin films deposited using radio frequency magnetron sputtering
by: Albert Alim, Emilly
Published: (2014)

Layer-by-layer plasma enhanced chemical vapour deposition of nanocrystalline silicon thin films / Goh Boon Tong
by: Goh, Boon Tong
Published: (2012)

Structure and optical properties of multi-phase structured amorphous silicon carbon nitride thin films deposited by plasma enhanced chemical vapour deposition / Mohd Azam Abdul Rahman
by: Mohd Azam , Abdul Rahman
Published: (2018)

Pressure dependent structural and optical properties of silicon carbide thin films deposited by hot wire chemical vapor deposition from pure silane and methane gases
by: Shariatmadar Tehrani, F., et al.
Published: (2012)

Conduction mechanisms in diamond-like carbon thin films prepared by PECVD method
by: Ab. Kaderld, Mohd. Azamnie
Published: (2010)

Raman and UV-visible spectrophotometer studies of hydrogenated amorphous carbon thin films
by: A. B., Suriani, et al.
Published: (2009)

Surface roughness and infra-red study of diamond-like carbon thin films
by: Roslan, Bibi Aishah
Published: (2010)

Structural, morphological, optical, and photoluminescence properties of piperine thin films deposited by spin-coating technique
by: Mohd Sarjidan, Mohd. Arif, et al.
Published: (2021)

Effect of nanometric and micronic particles size on physical and electrical properties of graphite thick film
by: Farah Nabilah, Shafiee, et al.
Published: (2021)

SnO2/Pt thin film laser ablated gas sensor array
by: Abadi, Mohammad Hadi Nezhad Shahrokh, et al.
Published: (2011)