Effects of radio-frequency power on structural properties and morphology of AlGaN thin film prepared by co-sputtering technique
To date, the deposition of AlGaN thin film using the co-sputtering technique at room temperature has not been reported yet. The use of AlGaN for electronic devices has been widely known because of its ultra-wide bandgap. However, to deposit the AlGaN thin film and achieved high quality of AlGaN film...
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| Main Authors: | , , , , , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Penerbit UTM Press
2021
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| Subjects: | |
| Online Access: | http://eprints.utm.my/id/eprint/97561/1/MohdZamri2021_EffectsofRadioFrequencyPower.pdf http://eprints.utm.my/id/eprint/97561/ http://dx.doi.org/10.11113/elektrika.v20n2.270 |
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