UV-Vis characterization of diamond-like carbon thin films deposited using (DC-PECVD)
A study of optical properties of Diamond-like Carbon Thin Films deposited by DC-PECVD. The films was deposited on the corning with the ratio of Hydrogen, H2 (97%) and Methane, CH4 (3%). The temperatures were varied between 200°C to 600°C while maintaining other important variables such as DC voltage...
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| Format: | Thesis |
| Language: | English |
| Published: |
2010
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| Online Access: | http://eprints.utm.my/id/eprint/16745/7/NurAlifahAbMFSA2010.pdf http://eprints.utm.my/id/eprint/16745/ |
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