Infrared analysis of a-C:H thin films grown by DC-PECVD at various chamber pressures
Infrared spectroscopy (IR spectroscopy or vibrational spectroscopy) involves the interaction of infrared radiation with matter. It covers a range of techniques, mostly based on absorption spectroscopy. As with all spectroscopic techniques, it can be used to identify and study chemicals.
Saved in:
| Main Authors: | , , , |
|---|---|
| Format: | Conference or Workshop Item |
| Published: |
2003
|
| Subjects: | |
| Online Access: | http://eprints.utm.my/id/eprint/22538/ |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|