Undoped diamond-like carbon thin films grown by direct current-plasma enhanced chemical vapour deposition: structural and electrical properties
Undoped diamond - like carbon thin films have been grown by DC - PECVD system. The synthesis of the DLC films was carried out in the presence of gas of (CH4 + H2 + Ar) in a custom - made reactor. The substrate temperature was initiated from the range of 300 °C to 600 °C under an optimum pressurized...
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| Main Authors: | , , , , |
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| Format: | Conference or Workshop Item |
| Published: |
2013
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| Subjects: | |
| Online Access: | http://eprints.utm.my/id/eprint/67125/ http://dx.doi.org/10.4028/www.scientific.net/AMR.970.136 |
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