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Impact of KOH etching on nanostructure fabricated by local anodic oxidation method

In this letter, we investigate the impact of potassium hydroxide (KOH) etching procedure on Silicon nanostructure fabricated by Atomic force microscopy on P-type Silicon-on-insulator. An electrochemical process, as the local anodic oxidation followed by two wet chemical etching steps, KOH etch...

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主要な著者: Dehzangi, Arash, Larki, Farhad, Majlis, Burhanuddin Yeop, Naseri, Mahmood Goodarz, Navasery, Manizheh, Abdullah, A. Makarimi, Hutagalung, Sabar D., Abdul Hamid, Norihan, Mohd Noor, Mimiwaty, Vakilian, Mohammadmahdi, Saion, Elias
フォーマット: 論文
言語:English
出版事項: Electrochemical Science Group 2013
オンライン･アクセス:http://psasir.upm.edu.my/id/eprint/30415/1/Impact%20of%20KOH%20etching%20on%20nanostructure%20fabricated%20by%20local%20anodic%20oxidation%20method.pdf
http://psasir.upm.edu.my/id/eprint/30415/
http://www.electrochemsci.org/list13.htm#issue6
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http://psasir.upm.edu.my/id/eprint/30415/1/Impact%20of%20KOH%20etching%20on%20nanostructure%20fabricated%20by%20local%20anodic%20oxidation%20method.pdf
http://psasir.upm.edu.my/id/eprint/30415/
http://www.electrochemsci.org/list13.htm#issue6

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