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Impact of KOH etching on nanostructure fabricated by local anodic oxidation method

In this letter, we investigate the impact of potassium hydroxide (KOH) etching procedure on Silicon nanostructure fabricated by Atomic force microscopy on P-type Silicon-on-insulator. An electrochemical process, as the local anodic oxidation followed by two wet chemical etching steps, KOH etch...

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書目詳細資料
Main Authors:	Dehzangi, Arash, Larki, Farhad, Majlis, Burhanuddin Yeop, Naseri, Mahmood Goodarz, Navasery, Manizheh, Abdullah, A. Makarimi, Hutagalung, Sabar D., Abdul Hamid, Norihan, Mohd Noor, Mimiwaty, Vakilian, Mohammadmahdi, Saion, Elias
格式:	Article
語言:	English
出版:	Electrochemical Science Group 2013
在線閱讀:	http://psasir.upm.edu.my/id/eprint/30415/1/Impact%20of%20KOH%20etching%20on%20nanostructure%20fabricated%20by%20local%20anodic%20oxidation%20method.pdf http://psasir.upm.edu.my/id/eprint/30415/ http://www.electrochemsci.org/list13.htm#issue6
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