Impact of KOH etching on nanostructure fabricated by local anodic oxidation method
In this letter, we investigate the impact of potassium hydroxide (KOH) etching procedure on Silicon nanostructure fabricated by Atomic force microscopy on P-type Silicon-on-insulator. An electrochemical process, as the local anodic oxidation followed by two wet chemical etching steps, KOH etch...
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| Main Authors: | , , , , , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Electrochemical Science Group
2013
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| Online Access: | http://psasir.upm.edu.my/id/eprint/30415/1/Impact%20of%20KOH%20etching%20on%20nanostructure%20fabricated%20by%20local%20anodic%20oxidation%20method.pdf http://psasir.upm.edu.my/id/eprint/30415/ http://www.electrochemsci.org/list13.htm#issue6 |
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