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Impact of KOH etching on nanostructure fabricated by local anodic oxidation method

In this letter, we investigate the impact of potassium hydroxide (KOH) etching procedure on Silicon nanostructure fabricated by Atomic force microscopy on P-type Silicon-on-insulator. An electrochemical process, as the local anodic oxidation followed by two wet chemical etching steps, KOH etch...

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Bibliographic Details
Main Authors: Dehzangi, Arash, Larki, Farhad, Majlis, Burhanuddin Yeop, Naseri, Mahmood Goodarz, Navasery, Manizheh, Abdullah, A. Makarimi, Hutagalung, Sabar D., Abdul Hamid, Norihan, Mohd Noor, Mimiwaty, Vakilian, Mohammadmahdi, Saion, Elias
Format: Article
Language:English
Published: Electrochemical Science Group 2013
Online Access:http://psasir.upm.edu.my/id/eprint/30415/1/Impact%20of%20KOH%20etching%20on%20nanostructure%20fabricated%20by%20local%20anodic%20oxidation%20method.pdf
http://psasir.upm.edu.my/id/eprint/30415/
http://www.electrochemsci.org/list13.htm#issue6
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http://psasir.upm.edu.my/id/eprint/30415/1/Impact%20of%20KOH%20etching%20on%20nanostructure%20fabricated%20by%20local%20anodic%20oxidation%20method.pdf
http://psasir.upm.edu.my/id/eprint/30415/
http://www.electrochemsci.org/list13.htm#issue6

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