Parallel scanning near-field photolithography: the Snomipede
The “Millipede”, developed by Binnig and co-workers (Bining, G. K.; et al. IBM J. Res. Devel. 2000, 44, 323.), elegantly solves the problem of the serial nature of scanning probe lithography processes, by deploying massive parallelism. Here we fuse the “Millipede” concept with scanning near-field ph...
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| Main Authors: | , , , , , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
American Chemical Society
2010
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| Online Access: | http://psasir.upm.edu.my/id/eprint/16036/1/Parallel%20scanning%20near-field%20photolithography%20%20the%20snomipede..pdf http://psasir.upm.edu.my/id/eprint/16036/ http://pubs.acs.org/doi/abs/10.1021/nl1018782 |
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