Description: Fabrication of silicon nanowires by electron beam lithography and thermal oxidation size reduction method

Link to publisher's homepage at http://www.ttp.net/

Saved in:

Bibliographic Details
Main Authors:	Mohammad Nuzaihan, Md Nor, Uda, Hashim, Prof. Dr., Nazwa, Taib, Tijjani Adam, Shuwa
Other Authors:	m.nuzaihan@unimap.edu.my
Format:	Article
Language:	English
Published:	Trans Tech Publications 2014
Subjects:	Advance nanolithography Atomic force microscopy (AFM) BOE EBL Inductively coupled plasma-reactive ion etching ma-N2400 negative resist Silicon nanowire Size-reduction Thermal oxidation
Online Access:	http://dspace.unimap.edu.my:80/dspace/handle/123456789/33553
Tags:	Add Tag No Tags, Be the first to tag this record!

Description
Summary:	Link to publisher's homepage at http://www.ttp.net/