Holdings: Fabrication of silicon nanowires by electron beam lithography and thermal oxidation size reduction method

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Bibliographic Details
Main Authors:	Mohammad Nuzaihan, Md Nor, Uda, Hashim, Prof. Dr., Nazwa, Taib, Tijjani Adam, Shuwa
Other Authors:	m.nuzaihan@unimap.edu.my
Format:	Article
Language:	English
Published:	Trans Tech Publications 2014
Subjects:	Advance nanolithography Atomic force microscopy (AFM) BOE EBL Inductively coupled plasma-reactive ion etching ma-N2400 negative resist Silicon nanowire Size-reduction Thermal oxidation
Online Access:	http://dspace.unimap.edu.my:80/dspace/handle/123456789/33553
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