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Reactive Ion Etching (RIE) Etched Wet-Silica-On-Silicon Analysis for Fluid Wettability

RIE etched wet silica-on-silicon analysis is more to surface roughness analysis which analysis on silica substrate after plasma etching especially on de-ionized water droplets testing for fluid wettability scope. The thick oxide is needed for RIE purpose and characterized the etching and surface pr...

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Bibliographic Details
Main Author: Noor Aini Hamimah Abd. Rahim
Other Authors: Prabakaran Poopalan, Assoc. Prof. Dr. (Advisor)
Format: Learning Object
Language:English
Published: Universiti Malaysia Perlis 2008
Subjects:
Silica
Reactive Ion Etching (RIE)
Silica-on-silicon analysis
Surface roughness analysis
Atomic Force Microscope
Wet-Silica-On-Silicon Analysis
Online Access:http://dspace.unimap.edu.my/xmlui/handle/123456789/1333
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http://dspace.unimap.edu.my/xmlui/handle/123456789/1333

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