Design optimisation of high sensitivity MEMS piezoresistive intracranial pressure sensor using Taguchi approach
MEMS piezoresistive pressure sensors have been contemporarily used to measure intracranial pressure. Since an intracranial signal is of the pulsating type, the microsensor must be very sensitive to detect these changes. The sensitivity of the existing MEMS piezoresistive intracranial pressure sensor...
Saved in:
Main Authors: | Mohamad, Mazita, Soin, Norhayati, Ibrahim, Fatimah |
---|---|
Format: | Article |
Published: |
Springer Verlag
2018
|
Subjects: | |
Online Access: | http://eprints.um.edu.my/21268/ https://doi.org/10.1007/s00542-017-3699-8 |
Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
Similar Items
-
Load deflection analysis of rectangular graphene diaphragm for MEMS intracranial pressure sensor applications
by: Rahman, Siti Hajar Abd, et al.
Published: (2018) -
Electrical testing for MEMS's piezoresistive pressure sensor
by: Abd Wahab, M.Z.B., et al.
Published: (2017) -
Design and analysis of MEMS high sensitive capacitive pressure sensor
by: Ali, M., et al.
Published: (2016) -
Sensitivity of piezoresistive pressure sensor with inner diaphragm
by: Chua, Kean Hong, et al.
Published: (2017) -
Sensitivity and Q-Factor trade-off analysis of MEMS pressure sensor for bladder implants
by: Norliana, Yusof, et al.
Published: (2018)