Design optimisation of high sensitivity MEMS piezoresistive intracranial pressure sensor using Taguchi approach

MEMS piezoresistive pressure sensors have been contemporarily used to measure intracranial pressure. Since an intracranial signal is of the pulsating type, the microsensor must be very sensitive to detect these changes. The sensitivity of the existing MEMS piezoresistive intracranial pressure sensor...

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書誌詳細
主要な著者: Mohamad, Mazita, Soin, Norhayati, Ibrahim, Fatimah
フォーマット: 論文
出版事項: Springer Verlag 2018
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オンライン・アクセス:http://eprints.um.edu.my/21268/
https://doi.org/10.1007/s00542-017-3699-8
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