Beam parameters optimization of MEMS piezoresistive accelerometer by using response surface method
This article presents the optimization of a MEMS-based piezoresistive accelerometer sensor using design of experiment (DOE) approach. Two structures of accelerometers, which consist of a proof mass suspended by eight beams, have been investigated. Response surface method (RSM) was employed to op...
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| Main Authors: | , , , |
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| Format: | Conference or Workshop Item |
| Language: | English English English |
| Published: |
2021
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| Subjects: | |
| Online Access: | http://eprints.unisza.edu.my/4264/1/FH03-FRIT-21-55630.pdf http://eprints.unisza.edu.my/4264/2/FH03-FRIT-21-55631.pdf http://eprints.unisza.edu.my/4264/3/FH03-FRIT-21-56579.pdf http://eprints.unisza.edu.my/4264/ |
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