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Development of copper based miniature electrostatic actuator using WEDM with low actuation voltage

Fabricating electrostatic micro actuator, such as comb-drive actuator, is one of the demanding areas of the MEMS technology because of the promising applications in modern engineering, such as, micro-switches, attenuators, filters, micro-lenses, optical waveguide couplers, modulation, interfero...

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Main Authors: Bhuiyan, Moinul, Shihab, Baten
Format: Article
Language:English
Published: Springer 2014
Subjects:
TJ Mechanical engineering and machinery
Online Access:http://irep.iium.edu.my/39442/1/Electrostatic_Actuator.pdf
http://irep.iium.edu.my/39442/
http://www.springer.com/home?SGWID=0-0-1003-0-0&aqId=2757080&download=1&checkval=eaea3bd89f7030f6f651dfde92f99900
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spelling my.iium.irep.394422018-05-24T01:48:19Z http://irep.iium.edu.my/39442/ Development of copper based miniature electrostatic actuator using WEDM with low actuation voltage Bhuiyan, Moinul Shihab, Baten TJ Mechanical engineering and machinery Fabricating electrostatic micro actuator, such as comb-drive actuator, is one of the demanding areas of the MEMS technology because of the promising applications in modern engineering, such as, micro-switches, attenuators, filters, micro-lenses, optical waveguide couplers, modulation, interferometer, dynamic focus mirror, and chopper. For the fabrication, most of the cases silicon monocrystalline wafers are used through complex process. To etch the silicon substrates, researchers often use deep reactive-ion etching or anisotropic wet etching procedure which are time consuming and unsuitable for batch fabrication process. Again, resent research shows that comb-drive actuators need comparatively high voltage for actuation. In solving these problems, the study presents a copper based electrostatic micro actuator with low actuation voltage. Using wire electrical discharge machine (WEDM), the actuator is fabricated where a light weight flexible spring model is introduced. Capacitor design model is applied to present a voltage controlling electronic circuit using Arduino micro controller unit. The experimental result shows that the actuator is able to produce 1.38 mN force for 15 V DC. The experiment also proves that coper based actuator design using WEDM technology is much easier for batch processing and could provide the advantages in rapid prototyping. Springer 2014-12 Article REM application/pdf en http://irep.iium.edu.my/39442/1/Electrostatic_Actuator.pdf Bhuiyan, Moinul and Shihab, Baten (2014) Development of copper based miniature electrostatic actuator using WEDM with low actuation voltage. Microsystem Technologies, 20 (12). ISSN 0946-7076 (In Press) http://www.springer.com/home?SGWID=0-0-1003-0-0&aqId=2757080&download=1&checkval=eaea3bd89f7030f6f651dfde92f99900 DOI 10.1007/s00542-014-2360-z
institution Universiti Islam Antarabangsa Malaysia
building IIUM Library
collection Institutional Repository
continent Asia
country Malaysia
content_provider International Islamic University Malaysia
content_source IIUM Repository (IREP)
url_provider http://irep.iium.edu.my/
language English
topic TJ Mechanical engineering and machinery
spellingShingle TJ Mechanical engineering and machinery
Bhuiyan, Moinul
Shihab, Baten
Development of copper based miniature electrostatic actuator using WEDM with low actuation voltage
description Fabricating electrostatic micro actuator, such as comb-drive actuator, is one of the demanding areas of the MEMS technology because of the promising applications in modern engineering, such as, micro-switches, attenuators, filters, micro-lenses, optical waveguide couplers, modulation, interferometer, dynamic focus mirror, and chopper. For the fabrication, most of the cases silicon monocrystalline wafers are used through complex process. To etch the silicon substrates, researchers often use deep reactive-ion etching or anisotropic wet etching procedure which are time consuming and unsuitable for batch fabrication process. Again, resent research shows that comb-drive actuators need comparatively high voltage for actuation. In solving these problems, the study presents a copper based electrostatic micro actuator with low actuation voltage. Using wire electrical discharge machine (WEDM), the actuator is fabricated where a light weight flexible spring model is introduced. Capacitor design model is applied to present a voltage controlling electronic circuit using Arduino micro controller unit. The experimental result shows that the actuator is able to produce 1.38 mN force for 15 V DC. The experiment also proves that coper based actuator design using WEDM technology is much easier for batch processing and could provide the advantages in rapid prototyping.
format Article
author Bhuiyan, Moinul
Shihab, Baten
author_facet Bhuiyan, Moinul
Shihab, Baten
author_sort Bhuiyan, Moinul
title Development of copper based miniature electrostatic actuator using WEDM with low actuation voltage
title_short Development of copper based miniature electrostatic actuator using WEDM with low actuation voltage
title_full Development of copper based miniature electrostatic actuator using WEDM with low actuation voltage
title_fullStr Development of copper based miniature electrostatic actuator using WEDM with low actuation voltage
title_full_unstemmed Development of copper based miniature electrostatic actuator using WEDM with low actuation voltage
title_sort development of copper based miniature electrostatic actuator using wedm with low actuation voltage
publisher Springer
publishDate 2014
url http://irep.iium.edu.my/39442/1/Electrostatic_Actuator.pdf
http://irep.iium.edu.my/39442/
http://www.springer.com/home?SGWID=0-0-1003-0-0&aqId=2757080&download=1&checkval=eaea3bd89f7030f6f651dfde92f99900
_version_ 1643611633036034048
score 13.211869

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