Development of copper based miniature electrostatic actuator using WEDM with low actuation voltage
Fabricating electrostatic micro actuator, such as comb-drive actuator, is one of the demanding areas of the MEMS technology because of the promising applications in modern engineering, such as, micro-switches, attenuators, filters, micro-lenses, optical waveguide couplers, modulation, interfero...
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| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
Springer
2014
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| Subjects: | |
| Online Access: | http://irep.iium.edu.my/39442/1/Electrostatic_Actuator.pdf http://irep.iium.edu.my/39442/ http://www.springer.com/home?SGWID=0-0-1003-0-0&aqId=2757080&download=1&checkval=eaea3bd89f7030f6f651dfde92f99900 |
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