Mechanical behavior of an electrostatically actuated micropump
We present a model of an electrostatically actuated micropump employing an annular actuating member. The boundary-value problem describing the static deflection of the plate under the electrostatic force is solved numerically. The eigenvalue problem describing the vibration of the plate around the e...
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| Main Authors: | , , |
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| Format: | Conference or Workshop Item |
| Language: | English |
| Published: |
2002
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| Subjects: | |
| Online Access: | http://irep.iium.edu.my/49864/3/49864-new.pdf http://irep.iium.edu.my/49864/ http://dx.doi.org/10.2514/6.2002-1303 |
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