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Design optimization of MEMS dual-leg shaped piezoresistive microcantilever

In this paper, an optimization on the mechanical behaviour of silicon piezoresistive microcantilever (PRM) has been carried out. Using CoventorWare 2008, the mechanical behavior of the PRM structure was investigated by studying few contributing factors that affect the performance of the device. The...

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書誌詳細
主要な著者:	Ab Rahim, Rosminazuin, Bais, Badariah, Yeop Majlis, Burhanuddin, Sheik, Fareed
フォーマット:	Conference or Workshop Item
言語:	English
出版事項:	2013
主題:	Q Science (General)
オンライン･アクセス:	http://irep.iium.edu.my/34881/1/IEEE_Published_RSM_2013.pdf http://irep.iium.edu.my/34881/ http://ieeexplore.ieee.org
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