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Design optimization of MEMS dual-leg shaped piezoresistive microcantilever

In this paper, an optimization on the mechanical behaviour of silicon piezoresistive microcantilever (PRM) has been carried out. Using CoventorWare 2008, the mechanical behavior of the PRM structure was investigated by studying few contributing factors that affect the performance of the device. The...

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Main Authors: Ab Rahim, Rosminazuin, Bais, Badariah, Yeop Majlis, Burhanuddin, Sheik, Fareed
Format: Conference or Workshop Item
Language:English
Published: 2013
Subjects:
Q Science (General)
Online Access:http://irep.iium.edu.my/34881/1/IEEE_Published_RSM_2013.pdf
http://irep.iium.edu.my/34881/
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spelling my.iium.irep.348812015-04-19T21:30:43Z http://irep.iium.edu.my/34881/ Design optimization of MEMS dual-leg shaped piezoresistive microcantilever Ab Rahim, Rosminazuin Bais, Badariah Yeop Majlis, Burhanuddin Sheik, Fareed Q Science (General) In this paper, an optimization on the mechanical behaviour of silicon piezoresistive microcantilever (PRM) has been carried out. Using CoventorWare 2008, the mechanical behavior of the PRM structure was investigated by studying few contributing factors that affect the performance of the device. The performance was represented with mechanical displacement of the suspended PRM sensor with regards to various factors such as the microcantilever shape and geometrical dimensions, the materials and the effect of incorporating stress concentration region (SCR) on the device structure. In this research work, a single-layer piezoresistive microcantilever in which both piezoresistor and microcantilever structures are made of the same material of single-crystalline silicon is utilized. Two dual-leg shaped piezoresistive microcantilever designs have been proposed:piezoresistive microcantilever with and without a square hole. From the simulation results, it can be seen that the maximum displacement is observed at maximum microcantilever’s length and minimum thickness. The incorporation of a square hole as an SCR not only shows a significant increase in Mises stress value but also in the displacement of the microcantilever structure. Single-crystalline Si was chosen as the device material for the fabrication of single-layer piezoresistive microcantilever due to its high piezoresistive coefficients and thermal conductivity. 2013 Conference or Workshop Item REM application/pdf en http://irep.iium.edu.my/34881/1/IEEE_Published_RSM_2013.pdf Ab Rahim, Rosminazuin and Bais, Badariah and Yeop Majlis, Burhanuddin and Sheik, Fareed (2013) Design optimization of MEMS dual-leg shaped piezoresistive microcantilever. In: 2013 IEEE Regional Symposium on Micro and Nano Electronics (RSM 2013), 25-27 October 2013, Langkawi, Malaysia. http://ieeexplore.ieee.org
institution Universiti Islam Antarabangsa Malaysia
building IIUM Library
collection Institutional Repository
continent Asia
country Malaysia
content_provider International Islamic University Malaysia
content_source IIUM Repository (IREP)
url_provider http://irep.iium.edu.my/
language English
topic Q Science (General)
spellingShingle Q Science (General)
Ab Rahim, Rosminazuin
Bais, Badariah
Yeop Majlis, Burhanuddin
Sheik, Fareed
Design optimization of MEMS dual-leg shaped piezoresistive microcantilever
description In this paper, an optimization on the mechanical behaviour of silicon piezoresistive microcantilever (PRM) has been carried out. Using CoventorWare 2008, the mechanical behavior of the PRM structure was investigated by studying few contributing factors that affect the performance of the device. The performance was represented with mechanical displacement of the suspended PRM sensor with regards to various factors such as the microcantilever shape and geometrical dimensions, the materials and the effect of incorporating stress concentration region (SCR) on the device structure. In this research work, a single-layer piezoresistive microcantilever in which both piezoresistor and microcantilever structures are made of the same material of single-crystalline silicon is utilized. Two dual-leg shaped piezoresistive microcantilever designs have been proposed:piezoresistive microcantilever with and without a square hole. From the simulation results, it can be seen that the maximum displacement is observed at maximum microcantilever’s length and minimum thickness. The incorporation of a square hole as an SCR not only shows a significant increase in Mises stress value but also in the displacement of the microcantilever structure. Single-crystalline Si was chosen as the device material for the fabrication of single-layer piezoresistive microcantilever due to its high piezoresistive coefficients and thermal conductivity.
format Conference or Workshop Item
author Ab Rahim, Rosminazuin
Bais, Badariah
Yeop Majlis, Burhanuddin
Sheik, Fareed
author_facet Ab Rahim, Rosminazuin
Bais, Badariah
Yeop Majlis, Burhanuddin
Sheik, Fareed
author_sort Ab Rahim, Rosminazuin
title Design optimization of MEMS dual-leg shaped piezoresistive microcantilever
title_short Design optimization of MEMS dual-leg shaped piezoresistive microcantilever
title_full Design optimization of MEMS dual-leg shaped piezoresistive microcantilever
title_fullStr Design optimization of MEMS dual-leg shaped piezoresistive microcantilever
title_full_unstemmed Design optimization of MEMS dual-leg shaped piezoresistive microcantilever
title_sort design optimization of mems dual-leg shaped piezoresistive microcantilever
publishDate 2013
url http://irep.iium.edu.my/34881/1/IEEE_Published_RSM_2013.pdf
http://irep.iium.edu.my/34881/
http://ieeexplore.ieee.org
_version_ 1643610697309880320
score 13.211869

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