Fabrication of monolithic wheatstone bridge circuit for piezoresistive microcantilever sensor
In this paper, the fabrication of monolithic Wheatstone bridge circuit on piezoresistive microcantilever sensor is presented. The development of the device is realized through silicon micromachining technology on silicon substrate through three major fabrication steps including silicon piezoresisti...
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| Main Authors: | , , , , |
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| Format: | Conference or Workshop Item |
| Language: | English English |
| Published: |
2015
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| Subjects: | |
| Online Access: | http://irep.iium.edu.my/44490/1/44490.pdf http://irep.iium.edu.my/44490/4/44490_Fabrication%20of%20monolithic%20wheatstone%20bridge_Scopus.pdf http://irep.iium.edu.my/44490/ http://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=7160998 |
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