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Surface roughness of FIB sputtered silicon

Mathematical models are developed to calculate the surface roughness of focused-ion-beam (FIB) sputtered surface. The surface roughness is the combination of the beam function and the material function. The beam function includes ion type, acceleration voltage, ion flux, intensity distribution,...

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書誌詳細
主要な著者:	Ali, Mohammad Yeakub, Hung, N. P., Yuan, S.
その他の著者:	Inasaki, Ichiro
フォーマット:	Conference or Workshop Item
言語:	English
出版事項:	Kluwer Academic Publishers (Springer) 2001
主題:	TJ Mechanical engineering and machinery TS Manufactures
オンライン･アクセス:	http://irep.iium.edu.my/28903/1/surface_of_roughness.pdf http://irep.iium.edu.my/28903/
タグ:	タグ追加タグなし, このレコードへの初めてのタグを付けませんか!

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