Fabrication of silicon nanopillar sheet for Cell Culture Dish
This paper discusses the fabrication of nanopillars using focused ion beam (FIB) sputtering. A 25 keV Ga+ FIB was used to machine the nanopillars. A reversed bitmap method was used to fabricate nanopillars where it milled the substrate all over except the nanopillar area. The height of the nanopilla...
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| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
Trans Tech Publications, Switzerland
2011
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| Subjects: | |
| Online Access: | http://irep.iium.edu.my/2281/1/AMR_2011_Vol_264-265__1352-1356.pdf http://irep.iium.edu.my/2281/ http://www.scientific.net |
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