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Surface roughness of FIB sputtered silicon

Mathematical models are developed to calculate the surface roughness of focused-ion-beam (FIB) sputtered surface. The surface roughness is the combination of the beam function and the material function. The beam function includes ion type, acceleration voltage, ion flux, intensity distribution,...

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Bibliographic Details
Main Authors: Ali, Mohammad Yeakub, Hung, N. P., Yuan, S.
Other Authors: Inasaki, Ichiro
Format: Conference or Workshop Item
Language:English
Published: Kluwer Academic Publishers (Springer) 2001
Subjects:
TJ Mechanical engineering and machinery
TS Manufactures
Online Access:http://irep.iium.edu.my/28903/1/surface_of_roughness.pdf
http://irep.iium.edu.my/28903/
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spelling my.iium.irep.289032013-06-25T05:23:30Z http://irep.iium.edu.my/28903/ Surface roughness of FIB sputtered silicon Ali, Mohammad Yeakub Hung, N. P. Yuan, S. TJ Mechanical engineering and machinery TS Manufactures Mathematical models are developed to calculate the surface roughness of focused-ion-beam (FIB) sputtered surface. The surface roughness is the combination of the beam function and the material function. The beam function includes ion type, acceleration voltage, ion flux, intensity distribution, dwell time, etc; the material function includes the inherent material properties related to FIB micromachining. Surface of FIB sputtered (100) silicon was characterized using atomic force microscope. Reasonable agreement between the calculated and measured surface roughness was found. Kluwer Academic Publishers (Springer) Inasaki, Ichiro 2001 Conference or Workshop Item REM application/pdf en http://irep.iium.edu.my/28903/1/surface_of_roughness.pdf Ali, Mohammad Yeakub and Hung, N. P. and Yuan, S. (2001) Surface roughness of FIB sputtered silicon. In: Precision Engineering at the Beginning of a Millenium (ICPE), 18-20 July 2001, Yokohama, Japan.
institution Universiti Islam Antarabangsa Malaysia
building IIUM Library
collection Institutional Repository
continent Asia
country Malaysia
content_provider International Islamic University Malaysia
content_source IIUM Repository (IREP)
url_provider http://irep.iium.edu.my/
language English
topic TJ Mechanical engineering and machinery
TS Manufactures
spellingShingle TJ Mechanical engineering and machinery
TS Manufactures
Ali, Mohammad Yeakub
Hung, N. P.
Yuan, S.
Surface roughness of FIB sputtered silicon
description Mathematical models are developed to calculate the surface roughness of focused-ion-beam (FIB) sputtered surface. The surface roughness is the combination of the beam function and the material function. The beam function includes ion type, acceleration voltage, ion flux, intensity distribution, dwell time, etc; the material function includes the inherent material properties related to FIB micromachining. Surface of FIB sputtered (100) silicon was characterized using atomic force microscope. Reasonable agreement between the calculated and measured surface roughness was found.
author2 Inasaki, Ichiro
author_facet Inasaki, Ichiro
Ali, Mohammad Yeakub
Hung, N. P.
Yuan, S.
format Conference or Workshop Item
author Ali, Mohammad Yeakub
Hung, N. P.
Yuan, S.
author_sort Ali, Mohammad Yeakub
title Surface roughness of FIB sputtered silicon
title_short Surface roughness of FIB sputtered silicon
title_full Surface roughness of FIB sputtered silicon
title_fullStr Surface roughness of FIB sputtered silicon
title_full_unstemmed Surface roughness of FIB sputtered silicon
title_sort surface roughness of fib sputtered silicon
publisher Kluwer Academic Publishers (Springer)
publishDate 2001
url http://irep.iium.edu.my/28903/1/surface_of_roughness.pdf
http://irep.iium.edu.my/28903/
_version_ 1643609571617406976
score 13.211869

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