Surface roughness of FIB sputtered silicon

Mathematical models are developed to calculate the surface roughness of focused-ion-beam (FIB) sputtered surface. The surface roughness is the combination of the beam function and the material function. The beam function includes ion type, acceleration voltage, ion flux, intensity distribution,...

وصف كامل

محفوظ في:
التفاصيل البيبلوغرافية
المؤلفون الرئيسيون: Ali, Mohammad Yeakub, Hung, N. P., Yuan, S.
مؤلفون آخرون: Inasaki, Ichiro
التنسيق: Conference or Workshop Item
اللغة:English
منشور في: Kluwer Academic Publishers (Springer) 2001
الموضوعات:
الوصول للمادة أونلاين:http://irep.iium.edu.my/28903/1/surface_of_roughness.pdf
http://irep.iium.edu.my/28903/
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الوصف
الملخص:Mathematical models are developed to calculate the surface roughness of focused-ion-beam (FIB) sputtered surface. The surface roughness is the combination of the beam function and the material function. The beam function includes ion type, acceleration voltage, ion flux, intensity distribution, dwell time, etc; the material function includes the inherent material properties related to FIB micromachining. Surface of FIB sputtered (100) silicon was characterized using atomic force microscope. Reasonable agreement between the calculated and measured surface roughness was found.