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CHARACTERIZATION OF A CMOS-MEMS DEVICE FOR THE DETECTION OF WEAK VIBRATION

The paper review about the usage of the integration between Complementary Metal Oxide System and Micromechanical system (CMOS-MEMS device) for the detection of weak vibration. The available CMOS-MEMS device at Universiti Teknologi PETRONAS is the device that has high resonance frequency which is 6.1...

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書誌詳細
第一著者:	ABDUL RASHID, DANIAL HAFIZ
フォーマット:	Final Year Project
言語:	English
出版事項:	2017
オンライン･アクセス:	http://utpedia.utp.edu.my/id/eprint/19100/1/Final%20Dissertation%20Danial%20Hafiz%2019139.pdf http://utpedia.utp.edu.my/id/eprint/19100/
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