Theoretical modeling and FEA simulation of a CMOS-MEMS resonator
Relative humidity sensing is crucial in many applications. However, hysteresis, lack of stability and low accuracy still exist in some of the available humidity sensors. This paper studies the effect of changing the supported beams' length and width on the resonance frequency and mass sensitivi...
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| Main Authors: | , , , , |
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| Format: | Article |
| Published: |
Institute of Electrical and Electronics Engineers Inc.
2017
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| Online Access: | https://www.scopus.com/inward/record.uri?eid=2-s2.0-85039941971&doi=10.1109%2fRSM.2017.8069110&partnerID=40&md5=802b8843825be9683c8ec5731c35d9a1 http://eprints.utp.edu.my/19992/ |
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