Performance analysis of PDMS polymer as a MEMS FPOTF actuator
The usage of polymer as Micro-electro-mechanical system (MEMS) actuator has received a great intention due to high elasticity characteristic, hence lower the power consumption [1]. Poly-dimethyl siloxane (PDMS) is one of the polymers that widely used in MEMS application. This chapter evaluates the s...
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| Main Authors: | , , |
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| Format: | Book Section |
| Language: | English |
| Published: |
Penerbit UTM
2008
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| Subjects: | |
| Online Access: | http://eprints.utm.my/id/eprint/25455/1/AbuBakarMohammad2008_PerformanceAnalysisOfPDMSPolymer.pdf http://eprints.utm.my/id/eprint/25455/ http://www.penerbit.utm.my/bookchapterdoc/FKE/bookchapter_fke38.pdf |
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