Wide range electrostatic MEMS Fabry Perot optical tunable filter: modelling an electrostatic and mechanic beam deflection
A novel wide range electrostatic microelectromechanical system floating Fabry Perot optical tunable filter (MEMS f-FPOTF) is modelled and analyzed in terms of its electro-mechanic behaviour. The composite beam approach has been used to model the floating Fabry Perot cavity. The floating dual membran...
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| Main Authors: | , , , |
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| Format: | Article |
| Published: |
Springer-Verlag
2011
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| Subjects: | |
| Online Access: | http://eprints.utm.my/id/eprint/29926/ http://dx.doi.org/10.1007/s00542-010-1194-6 |
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