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Performance analysis of PDMS polymer as a MEMS FPOTF actuator

The usage of polymer as Micro-electro-mechanical system (MEMS) actuator has received a great intention due to high elasticity characteristic, hence lower the power consumption [1]. Poly-dimethyl siloxane (PDMS) is one of the polymers that widely used in MEMS application. This chapter evaluates the s...

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Main Authors: Mohammad, Abu Bakar, Ngajikin, Nor Hafizah, Mohd. Kassim, Norazan
Format: Book Section
Language:English
Published: Penerbit UTM 2008
Subjects:
TK Electrical engineering. Electronics Nuclear engineering
Online Access:http://eprints.utm.my/id/eprint/25455/1/AbuBakarMohammad2008_PerformanceAnalysisOfPDMSPolymer.pdf
http://eprints.utm.my/id/eprint/25455/
http://www.penerbit.utm.my/bookchapterdoc/FKE/bookchapter_fke38.pdf
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spelling my.utm.254552012-05-21T03:57:27Z http://eprints.utm.my/id/eprint/25455/ Performance analysis of PDMS polymer as a MEMS FPOTF actuator Mohammad, Abu Bakar Ngajikin, Nor Hafizah Mohd. Kassim, Norazan TK Electrical engineering. Electronics Nuclear engineering The usage of polymer as Micro-electro-mechanical system (MEMS) actuator has received a great intention due to high elasticity characteristic, hence lower the power consumption [1]. Poly-dimethyl siloxane (PDMS) is one of the polymers that widely used in MEMS application. This chapter evaluates the suitability of PDMS as MEMS Fabry Perot Optical Tunable Filter (FPOTF) with electrostatic actuator. Poly-dimethly siloxane (PDMS) is commonly used in MEMS fluidic systems. In general, this type of polymer is more robust and high elasticity compared with other semiconductor material such as silicon [1]. Furthermore, PDMS is moderate in terms of temperature and humidity sensitivity as well as consume low processing and preparation cost. These factors make PDMS receive a great intention in many areas of MEMS application. In literature, PDMS as a MEMS actuator have been realized using several actuation methods. One type of sealed PDMS which is parylene-caulked PDMS is used in pneumatic actuator and shown a superior deflection for a given force which is bigger than 5kPa [2]. High deflection for a small given force shows the suitability of PDMS in MEMS electrostatic actuator. PDMS will reduce the consumption of DC voltage for a same amount of deflection compared with other semiconductor material. In this chapter, PDMS is proposed to be used as electrostatic actuator in MEMS FPOTF. PDMS will be used as a mirror holder and actuate in order to vary the length of cavity for wavelength tuning in CWDM wavelength region. Related theory, analytical model and analysis are presented in next section. Penerbit UTM 2008 Book Section PeerReviewed application/pdf en http://eprints.utm.my/id/eprint/25455/1/AbuBakarMohammad2008_PerformanceAnalysisOfPDMSPolymer.pdf Mohammad, Abu Bakar and Ngajikin, Nor Hafizah and Mohd. Kassim, Norazan (2008) Performance analysis of PDMS polymer as a MEMS FPOTF actuator. In: Recent Advances In Photonics Technology. Penerbit UTM , Johor, pp. 45-57. ISBN 978-983-52-0676-4 http://www.penerbit.utm.my/bookchapterdoc/FKE/bookchapter_fke38.pdf
institution Universiti Teknologi Malaysia
building UTM Library
collection Institutional Repository
continent Asia
country Malaysia
content_provider Universiti Teknologi Malaysia
content_source UTM Institutional Repository
url_provider http://eprints.utm.my/
language English
topic TK Electrical engineering. Electronics Nuclear engineering
spellingShingle TK Electrical engineering. Electronics Nuclear engineering
Mohammad, Abu Bakar
Ngajikin, Nor Hafizah
Mohd. Kassim, Norazan
Performance analysis of PDMS polymer as a MEMS FPOTF actuator
description The usage of polymer as Micro-electro-mechanical system (MEMS) actuator has received a great intention due to high elasticity characteristic, hence lower the power consumption [1]. Poly-dimethyl siloxane (PDMS) is one of the polymers that widely used in MEMS application. This chapter evaluates the suitability of PDMS as MEMS Fabry Perot Optical Tunable Filter (FPOTF) with electrostatic actuator. Poly-dimethly siloxane (PDMS) is commonly used in MEMS fluidic systems. In general, this type of polymer is more robust and high elasticity compared with other semiconductor material such as silicon [1]. Furthermore, PDMS is moderate in terms of temperature and humidity sensitivity as well as consume low processing and preparation cost. These factors make PDMS receive a great intention in many areas of MEMS application. In literature, PDMS as a MEMS actuator have been realized using several actuation methods. One type of sealed PDMS which is parylene-caulked PDMS is used in pneumatic actuator and shown a superior deflection for a given force which is bigger than 5kPa [2]. High deflection for a small given force shows the suitability of PDMS in MEMS electrostatic actuator. PDMS will reduce the consumption of DC voltage for a same amount of deflection compared with other semiconductor material. In this chapter, PDMS is proposed to be used as electrostatic actuator in MEMS FPOTF. PDMS will be used as a mirror holder and actuate in order to vary the length of cavity for wavelength tuning in CWDM wavelength region. Related theory, analytical model and analysis are presented in next section.
format Book Section
author Mohammad, Abu Bakar
Ngajikin, Nor Hafizah
Mohd. Kassim, Norazan
author_facet Mohammad, Abu Bakar
Ngajikin, Nor Hafizah
Mohd. Kassim, Norazan
author_sort Mohammad, Abu Bakar
title Performance analysis of PDMS polymer as a MEMS FPOTF actuator
title_short Performance analysis of PDMS polymer as a MEMS FPOTF actuator
title_full Performance analysis of PDMS polymer as a MEMS FPOTF actuator
title_fullStr Performance analysis of PDMS polymer as a MEMS FPOTF actuator
title_full_unstemmed Performance analysis of PDMS polymer as a MEMS FPOTF actuator
title_sort performance analysis of pdms polymer as a mems fpotf actuator
publisher Penerbit UTM
publishDate 2008
url http://eprints.utm.my/id/eprint/25455/1/AbuBakarMohammad2008_PerformanceAnalysisOfPDMSPolymer.pdf
http://eprints.utm.my/id/eprint/25455/
http://www.penerbit.utm.my/bookchapterdoc/FKE/bookchapter_fke38.pdf
_version_ 1643647592315224064
score 13.211869

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