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Characterization of TiAlBN Nanocomposite Coating deposited via Radio Frequency Magnetron Sputtering using Single Hot-Pressed Target

TiAlBN coatings have been deposited at varying bias voltage of 0, -60, and -150 V by radio frequency (RF) magnetron sputtering technique. A single hot-pressed Ti-Al-BN target was used for the deposition process. With glancing angle X-ray diffraction analysis (GAXRD), the nanocrystalline (nc-) (Ti,Al...

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Main Authors:	Mohd Rosli, z.m.rosli, Kwan, Wai Loon, Jariah, Mohamad Juoi, Nafarizal , Nayan, Zainab , Mahamud, Yusliza, Yusuf
格式:	Article
语言:	English
出版:	Trans Tech Publications, Switzerland 2013
主题:	Q Science (General) TA Engineering (General). Civil engineering (General)
在线阅读:	http://eprints.utem.edu.my/id/eprint/10954/1/Wai_Loon_2.pdf http://eprints.utem.edu.my/id/eprint/10954/ http://www.scopus.com/results/results.url?sort=plf-f&src=s&st1=z.m.rosli&sid=FD010EC1B79325833808BC93B26574F7.CnvicAmOODVwpVrjSeqQ%3a40&sot=b&sdt=b&sl=22&s=AUTHOR-NAME%28z.m.rosli%29&origin=searchbasic&txGid=FD010EC1B79325833808BC93B26574F7.CnvicAmOODVwpV
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