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Characterization of TiAlBN Nanocomposite Coating deposited via Radio Frequency Magnetron Sputtering using Single Hot-Pressed Target

TiAlBN coatings have been deposited at varying bias voltage of 0, -60, and -150 V by radio frequency (RF) magnetron sputtering technique. A single hot-pressed Ti-Al-BN target was used for the deposition process. With glancing angle X-ray diffraction analysis (GAXRD), the nanocrystalline (nc-) (Ti,Al...

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Main Authors: Mohd Rosli, z.m.rosli, Kwan, Wai Loon, Jariah, Mohamad Juoi, Nafarizal , Nayan, Zainab , Mahamud, Yusliza, Yusuf
Format: Article
Language:English
Published: Trans Tech Publications, Switzerland 2013
Subjects:
Q Science (General)
TA Engineering (General). Civil engineering (General)
Online Access:http://eprints.utem.edu.my/id/eprint/10954/1/Wai_Loon_2.pdf
http://eprints.utem.edu.my/id/eprint/10954/
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spelling my.utem.eprints.109542015-05-28T04:14:28Z http://eprints.utem.edu.my/id/eprint/10954/ Characterization of TiAlBN Nanocomposite Coating deposited via Radio Frequency Magnetron Sputtering using Single Hot-Pressed Target Mohd Rosli, z.m.rosli Kwan, Wai Loon Jariah, Mohamad Juoi Nafarizal , Nayan Zainab , Mahamud Yusliza, Yusuf Q Science (General) TA Engineering (General). Civil engineering (General) TiAlBN coatings have been deposited at varying bias voltage of 0, -60, and -150 V by radio frequency (RF) magnetron sputtering technique. A single hot-pressed Ti-Al-BN target was used for the deposition process. With glancing angle X-ray diffraction analysis (GAXRD), the nanocrystalline (nc-) (Ti,Al)N phase was identified. In addition, the existence of BN and TiB2 amorphous (a-) phase were detected by X-ray photoelectron spectroscopy (XPS) analysis. Thus, the deposited TiAlBN coatings were confirmed as nc-(Ti,Al)N/a-BN/a-TiB2 nanocomposite. On theother hand, it was found that optimum bias voltage used in present study is -60 V where the deposited TiAlBN coating exhibits an excellent adhesion quality. The adhesion quality of the coatings deposited at -60V bias voltage is classified as HF 1 evaluated using the Rockwell-C adhesion test method (developed by the Union of German Engineers). Trans Tech Publications, Switzerland 2013 Article PeerReviewed application/pdf en http://eprints.utem.edu.my/id/eprint/10954/1/Wai_Loon_2.pdf Mohd Rosli, z.m.rosli and Kwan, Wai Loon and Jariah, Mohamad Juoi and Nafarizal , Nayan and Zainab , Mahamud and Yusliza, Yusuf (2013) Characterization of TiAlBN Nanocomposite Coating deposited via Radio Frequency Magnetron Sputtering using Single Hot-Pressed Target. Advanced Materials Research, Vol. 626 (2013). pp. 298-301. ISSN 1022-6680 http://www.scopus.com/results/results.url?sort=plf-f&src=s&st1=z.m.rosli&sid=FD010EC1B79325833808BC93B26574F7.CnvicAmOODVwpVrjSeqQ%3a40&sot=b&sdt=b&sl=22&s=AUTHOR-NAME%28z.m.rosli%29&origin=searchbasic&txGid=FD010EC1B79325833808BC93B26574F7.CnvicAmOODVwpV 10.4028/www.scientific.net/AMR.626.298
institution Universiti Teknikal Malaysia Melaka
building UTEM Library
collection Institutional Repository
continent Asia
country Malaysia
content_provider Universiti Teknikal Malaysia Melaka
content_source UTEM Institutional Repository
url_provider http://eprints.utem.edu.my/
language English
topic Q Science (General)
TA Engineering (General). Civil engineering (General)
spellingShingle Q Science (General)
TA Engineering (General). Civil engineering (General)
Mohd Rosli, z.m.rosli
Kwan, Wai Loon
Jariah, Mohamad Juoi
Nafarizal , Nayan
Zainab , Mahamud
Yusliza, Yusuf
Characterization of TiAlBN Nanocomposite Coating deposited via Radio Frequency Magnetron Sputtering using Single Hot-Pressed Target
description TiAlBN coatings have been deposited at varying bias voltage of 0, -60, and -150 V by radio frequency (RF) magnetron sputtering technique. A single hot-pressed Ti-Al-BN target was used for the deposition process. With glancing angle X-ray diffraction analysis (GAXRD), the nanocrystalline (nc-) (Ti,Al)N phase was identified. In addition, the existence of BN and TiB2 amorphous (a-) phase were detected by X-ray photoelectron spectroscopy (XPS) analysis. Thus, the deposited TiAlBN coatings were confirmed as nc-(Ti,Al)N/a-BN/a-TiB2 nanocomposite. On theother hand, it was found that optimum bias voltage used in present study is -60 V where the deposited TiAlBN coating exhibits an excellent adhesion quality. The adhesion quality of the coatings deposited at -60V bias voltage is classified as HF 1 evaluated using the Rockwell-C adhesion test method (developed by the Union of German Engineers).
format Article
author Mohd Rosli, z.m.rosli
Kwan, Wai Loon
Jariah, Mohamad Juoi
Nafarizal , Nayan
Zainab , Mahamud
Yusliza, Yusuf
author_facet Mohd Rosli, z.m.rosli
Kwan, Wai Loon
Jariah, Mohamad Juoi
Nafarizal , Nayan
Zainab , Mahamud
Yusliza, Yusuf
author_sort Mohd Rosli, z.m.rosli
title Characterization of TiAlBN Nanocomposite Coating deposited via Radio Frequency Magnetron Sputtering using Single Hot-Pressed Target
title_short Characterization of TiAlBN Nanocomposite Coating deposited via Radio Frequency Magnetron Sputtering using Single Hot-Pressed Target
title_full Characterization of TiAlBN Nanocomposite Coating deposited via Radio Frequency Magnetron Sputtering using Single Hot-Pressed Target
title_fullStr Characterization of TiAlBN Nanocomposite Coating deposited via Radio Frequency Magnetron Sputtering using Single Hot-Pressed Target
title_full_unstemmed Characterization of TiAlBN Nanocomposite Coating deposited via Radio Frequency Magnetron Sputtering using Single Hot-Pressed Target
title_sort characterization of tialbn nanocomposite coating deposited via radio frequency magnetron sputtering using single hot-pressed target
publisher Trans Tech Publications, Switzerland
publishDate 2013
url http://eprints.utem.edu.my/id/eprint/10954/1/Wai_Loon_2.pdf
http://eprints.utem.edu.my/id/eprint/10954/
http://www.scopus.com/results/results.url?sort=plf-f&src=s&st1=z.m.rosli&sid=FD010EC1B79325833808BC93B26574F7.CnvicAmOODVwpVrjSeqQ%3a40&sot=b&sdt=b&sl=22&s=AUTHOR-NAME%28z.m.rosli%29&origin=searchbasic&txGid=FD010EC1B79325833808BC93B26574F7.CnvicAmOODVwpV
_version_ 1665905442284371968
score 13.211869

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