Design Of Master Mask Film, Fabrication Of PDMS Mold And Fabricate Uv Led Curing Unit To Test Imprint Capability Of Roll-To-Plate Nanoimprint Lithography System
Current optical lithography method still cannot cope with the increasing demands from the industry especially electronics and biomedical industry. Not just it is low throughput; it is also difficult to conduct, not to mention the end product of this method is not as accurately as anticipated. Due...
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| Main Author: | |
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| Format: | Monograph |
| Language: | English |
| Published: |
Universiti Sains Malaysia
2017
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| Online Access: | http://eprints.usm.my/53546/1/Design%20Of%20Master%20Mask%20Film%2C%20Fabrication%20Of%20PDMS%20Mold%20And%20Fabricate%20Uv%20Led%20Curing%20Unit%20To%20Test%20Imprint%20Capability%20Of%20Roll-To-Plate%20Nanoimprint%20Lithography%20System_Mohamad%20Hazwan%20Mohd%20Ghazali_M4_2017.pdf http://eprints.usm.my/53546/ |
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http://eprints.usm.my/53546/1/Design%20Of%20Master%20Mask%20Film%2C%20Fabrication%20Of%20PDMS%20Mold%20And%20Fabricate%20Uv%20Led%20Curing%20Unit%20To%20Test%20Imprint%20Capability%20Of%20Roll-To-Plate%20Nanoimprint%20Lithography%20System_Mohamad%20Hazwan%20Mohd%20Ghazali_M4_2017.pdfhttp://eprints.usm.my/53546/