Effects of argon/nitrogen sputtering gas on the microstructural, crystallographic and piezoelectric properties of AlN thin films
The growth of highly crystalline c-plane AlN �002� is extremely difficult, entailing high temperature and ultra-high vacuum condition. In sputtering technique, the addition of nitrogen into argon sputtering gas can significantly assist the formation of AlN �002� at low temperature. We incorporated p...
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Acta Materialia Inc
2024
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