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Impact of ar flow rates on micro-structural properties of ws2 thin film by rf magnetron sputtering

Tungsten disulfide (WS2) thin films were deposited on soda-lime glass (SLG) substrates using radio frequency (RF) magnetron sputtering at different Ar flow rates (3 to 7 sccm). The effect of Ar flow rates on the structural, morphology, and electrical properties of the WS2 thin films was investigated...

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Bibliographic Details
Main Authors:	Akhtaruzzaman M., Shahiduzzaman M., Amin N., Muhammad G., Islam M.A., Sobayel Bin Rafiq K., Sopian K.
Other Authors:	57195441001
Format:	Article
Published:	MDPI AG 2023
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