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Analysis of square shaped Microstructure based Electron Beam induced deposition

The fabrication of square shaped microstructures is studied by electron beam induced deposition (EBID) method using Scanning Electron Microscopy (SEM). EBID is a technique that allows the resistless deposition directly onto the sample substrate. Without using the precursor gas, the square shaped s...

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書誌詳細
第一著者:	Siti Fatimah Abd. Rahman
その他の著者:	Shaiful Nizam Mohyar (Advisor)
フォーマット:	Learning Object
言語:	English
出版事項:	Universiti Malaysia Perlis 2008
主題:	Electron beams Scanning electron microscopes Microelectronics Microstructure
オンライン･アクセス:	http://dspace.unimap.edu.my/xmlui/handle/123456789/1968
タグ:	タグ追加タグなし, このレコードへの初めてのタグを付けませんか!

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