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Analysis of square shaped Microstructure based Electron Beam induced deposition

The fabrication of square shaped microstructures is studied by electron beam induced deposition (EBID) method using Scanning Electron Microscopy (SEM). EBID is a technique that allows the resistless deposition directly onto the sample substrate. Without using the precursor gas, the square shaped s...

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Main Author: Siti Fatimah Abd. Rahman
Other Authors: Shaiful Nizam Mohyar (Advisor)
Format: Learning Object
Language:English
Published: Universiti Malaysia Perlis 2008
Subjects:
Electron beams
Scanning electron microscopes
Microelectronics
Microstructure
Online Access:http://dspace.unimap.edu.my/xmlui/handle/123456789/1968
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spelling my.unimap-19682008-09-05T09:03:09Z Analysis of square shaped Microstructure based Electron Beam induced deposition Siti Fatimah Abd. Rahman Shaiful Nizam Mohyar (Advisor) Electron beams Scanning electron microscopes Microelectronics Microstructure The fabrication of square shaped microstructures is studied by electron beam induced deposition (EBID) method using Scanning Electron Microscopy (SEM). EBID is a technique that allows the resistless deposition directly onto the sample substrate. Without using the precursor gas, the square shaped structures are grown in varies of deposition time. The deposition time was controlled from 6 ~ 18 minutes respectively with fixed beam energy 20 kV. In addition, the size, thickness and surface roughness of square shaped structures is studied by using atomic force microscopy (AFM). Increasing the deposition time from 6 ~ 18 minutes will increase the structures thickness from 38.16 nm to 92.08 nm while the rms value for surface roughness will decrease from 2.73 nm to 1.31 nm. 2008-09-05T09:03:09Z 2008-09-05T09:03:09Z 2008-04 Learning Object http://hdl.handle.net/123456789/1968 en Universiti Malaysia Perlis School of Microelectronic Engineering
institution Universiti Malaysia Perlis
building UniMAP Library
collection Institutional Repository
continent Asia
country Malaysia
content_provider Universiti Malaysia Perlis
content_source UniMAP Library Digital Repository
url_provider http://dspace.unimap.edu.my/
language English
topic Electron beams
Scanning electron microscopes
Microelectronics
Microstructure
spellingShingle Electron beams
Scanning electron microscopes
Microelectronics
Microstructure
Siti Fatimah Abd. Rahman
Analysis of square shaped Microstructure based Electron Beam induced deposition
description The fabrication of square shaped microstructures is studied by electron beam induced deposition (EBID) method using Scanning Electron Microscopy (SEM). EBID is a technique that allows the resistless deposition directly onto the sample substrate. Without using the precursor gas, the square shaped structures are grown in varies of deposition time. The deposition time was controlled from 6 ~ 18 minutes respectively with fixed beam energy 20 kV. In addition, the size, thickness and surface roughness of square shaped structures is studied by using atomic force microscopy (AFM). Increasing the deposition time from 6 ~ 18 minutes will increase the structures thickness from 38.16 nm to 92.08 nm while the rms value for surface roughness will decrease from 2.73 nm to 1.31 nm.
author2 Shaiful Nizam Mohyar (Advisor)
author_facet Shaiful Nizam Mohyar (Advisor)
Siti Fatimah Abd. Rahman
format Learning Object
author Siti Fatimah Abd. Rahman
author_sort Siti Fatimah Abd. Rahman
title Analysis of square shaped Microstructure based Electron Beam induced deposition
title_short Analysis of square shaped Microstructure based Electron Beam induced deposition
title_full Analysis of square shaped Microstructure based Electron Beam induced deposition
title_fullStr Analysis of square shaped Microstructure based Electron Beam induced deposition
title_full_unstemmed Analysis of square shaped Microstructure based Electron Beam induced deposition
title_sort analysis of square shaped microstructure based electron beam induced deposition
publisher Universiti Malaysia Perlis
publishDate 2008
url http://dspace.unimap.edu.my/xmlui/handle/123456789/1968
_version_ 1643787508217020416
score 13.211869

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